Response surface methodology (RSM) explores the relationships between several explanatory variables and one or more response variables. The main idea of RSM is to obtain an optimal response using a sequence of designed experiments. This model is easy to estimate and apply, although it is only an approximation.

We have applied RSM to achieve robust modeling and optimization solutions in technology computer-aided design.

  • X.-F. Xie, W.-J. Zhang, Y. Lu, Z. Li, J. Ruan, Y. Yao, Z.-L. Yang. Modeling and optimization system for semiconductor devices. Chinese Journal of Semiconductors, 2003, 24(3): 327-331.
  • Y. Lu, X.-F. Xie, W.-J. Zhang, Z.-L. Yang. Device and process synthesis of semiconductor. Chinese Journal of Semiconductors, 2002, 23(7): 772-776.
  • X.-F. Xie, Y. Lu, W.-J. Zhang, Z.-L. Yang. Device robust-design by using the response surface methodology. Chinese Journal of Semiconductors, 2002, 23(8): 817-824.