Response surface methodology (RSM) explores the relationships between several explanatory variables and one or more response variables. The main idea of RSM is to obtain an optimal response using a sequence of designed experiments. This model is easy to estimate and apply, although it is only an approximation.
- X.-F. Xie, W.-J. Zhang, Y. Lu, Z. Li, J. Ruan, Y. Yao, Z.-L. Yang. Modeling and optimization system for semiconductor devices. Chinese Journal of Semiconductors, 2003, 24(3): 327-331.
- Y. Lu, X.-F. Xie, W.-J. Zhang, Z.-L. Yang. Device and process synthesis of semiconductor. Chinese Journal of Semiconductors, 2002, 23(7): 772-776.
- X.-F. Xie, Y. Lu, W.-J. Zhang, Z.-L. Yang. Device robust-design by using the response surface methodology. Chinese Journal of Semiconductors, 2002, 23(8): 817-824.